摘要
采用数值方法对光敏层电阻率的非均匀分布及对位置敏感探测器(PSD)的影响进行了研究,结果显示,在现有的制作工艺保障最大电阻率变化不超过1%时,电阻率的非均匀分布对四边形PSD的非线性影响很小,相比较之下,其对一维PSD的影响要大的多。因此,光敏层电阻率的非均匀分布是造成一维PSD非线性的一个主要原因,而对于四边形二维PSD则不是主要原因。
The influences of non-homogeneous resistivity in the photosensitive layer on position sensitive detectors (PSD) are presented utilizing numerical method. The results show that the influence on one-dimensional PSD is considerably larger than that on tetra-lateral PSD when the maximum variation in resistivity over a total photosensitive layer is less than 1%. It also shows that in such a situation, the non-homogeneous resistivity in the photosensitive layer is not the main cause for the non-linearity of tetra-lateral PSD except one-dimensional PSD.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第1期84-86,89,共4页
Optical Technique
