远程Ar等离子体对聚四氟乙烯膜的表面改性被引量：23

Surface modification of polytetrafluoroethylenefilm by Ar remote-plasma

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摘要研究远程 Ar等离子体对聚氟乙烯 (PTFE)膜表面蚀刻和亲水性的影响 .将远程等离子体与常规等离子体处理工艺对 PTFE膜表面改性效果进行对比 ,结果表明 ,远程等离子体对基体材料表面具有更好的改性效果 .X射线光电子能谱 (XPS)分析表明 ,远程 Ar等离子体处理后的 PTFE膜在空气中氧化后可以在其表面引入更多的含氧基团 .推断其结构为C—O— C,O—C=O或 Remote-plasma is a novel technique for cold plasma treatment recently in the word, which offers many advantages for modification of substrate. In this paper,the properties of etching and wettability for PTFE film treated by direct plasma and various Ar remote-plasma have been studied comparatively.The study shows that direct plasma treatment leads to etching instead of modification. And there is great improvement of PTFE film wettability. X-ray photoelectron spectroscopy indicated new functional groups such as C—O—C,O—C=O and O—C—O have been introduced onto the PTFE film when treated FEFE film exposed to air for oxidation .

作者王琛刘小冲陈杰瑢李茹

机构地区西安交通大学生命科学与技术学院西安工程科技学院环境与化学工程学院

出处《纺织高校基础科学学报》 CAS 2004年第4期351-355,共5页 Basic Sciences Journal of Textile Universities

基金陕西省教育厅自然科学专项基金项目 ( 0 2 JK0 56)

关键词远程等离子体 AR 表面改性聚四氟乙烯(PTFE) remote plasma Ar surface modification polytetrafluoroethylene(PTFE)

分类号 O647.1 [理学—物理化学]

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