摘要
本文简要介绍了TK—65型特种油扩散泵的研制背景、指标、结构和特点,着重报导了该泵的测试结果及其分析。
The developing background, specifications, structures and feastures are briefly introduced. The particular attention is given to the tested results and qualitative analysis of the pump.
出处
《微细加工技术》
1993年第1期61-67,共7页
Microfabrication Technology
关键词
彩象显象管
排气
油扩散泵
diffusion pump
structrue
pumping speed
