摘要
研究了溶胶-凝胶工艺中溶液浓度、热处理条件和衬底材料对 PbTiO_3(简称 PT)薄膜结构的影响规律,用多层匀胶技术在(100)SrTiO_3 单晶衬底上制备出钙钛矿结构(001)择优取向的 PT 薄膜.(001)峰对(101)峰的取向率为98%.薄膜厚度为0.5～1.0μm,表面均匀、致密、无裂纹.在(100)Si 单晶衬底上制备出钙钛矿型结构的 PT 陶瓷薄膜,在室温下其介电常数 e 约为45～88,介电损耗为0.05,饱和极化强度为6.60μC/cm.
The influence of solution concentration,heat treatment and substrate sort on PbTiO_3thin film preparation with Sol-gel processing is studied.Using multilayer spinning technique,the(001)oriented PT thin film with perovskite structure was grown on SrTiO_3 single crystalsubstrate.The orientation ratio of(001)and(101)is about 98%,and the average grain size is0.2μm.Using same processing,polycrystalline PT ceramic thin film with perovskite structureon (100) Si single crystal substrate was prepared.The dielectric constant ε,the dielectric losstgδ,the remanent polarization P_r,the spontaneous polarization P_3 and the coercive field E_c ofceramic thin film on Si single crystal substrate are 45～88,0.05,3.30μC/cm^2,6.60μC/cm^2 and35kV/cm respectively.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1993年第1期93-98,共6页
Journal of Inorganic Materials
关键词
溶胶-凝胶
铁电薄膜
取向
Sol-gel
Thin film
Orientation
Polarization
