摘要
介绍一种应用于半导体光刻、微型机械、精密测量、超精密加工、微型装配、纳米技术等领域的新型磁悬浮平台,通过分析其数学模型的特点,采用多变量非线性的逆系统理论,对直线电动机驱动的磁悬浮平台这一多变量、非线性、强耦合的对象通过状态反馈进行推力动态解耦控制,使其成为三个独立的子系统,并用线性理论进行分析和设计.为了改善系统响应的快速性,采用复合控制方案.仿真实验结果表明,这种控制方案有较好的动态和静态特性.
A novel magnetic suspension platform has been presented in this paper.The magnetic suspension platform is a micro- electromechanical apparatus,which is widely used in semiconductor processing,circuit board manufacturing,micro-assembling system and so on.A decoupling control approach based on dynamic inversion has been employed for the magnetic suspension platform that is a nonlinear ,multivariable and strong coupling system.Therefore,this scheme makes the complicated system become simple and linear and the linear theory can be used to design.To improve the quick response,the compound control is used.The results of simulation indicate the proposed scheme has better dynamic and static characteristics.
出处
《沈阳工业大学学报》
EI
CAS
2005年第1期43-47,共5页
Journal of Shenyang University of Technology
关键词
磁悬浮平台
动态解耦控制
状态反馈
直线电机
复合控制
magnetic suspension platform
dynamic decoupling control
state feedback
linear motor
compound control
