摘要
在非球面干涉测量中,常用标准球面波作为测量光束,由于入射光线不垂直于被测表面,因此反射波面的波差并不能真实反映被测非球面与顶点球面的偏差,还会引起严重的测量误差。本文从理论上对这一误差进行分析和讨论。
In interferometric testing of aspheric surface, a spheric beam is often used as a testing wavefront, all the rays in the beam are not normal to the surface under test. The wave aberration of the reflected wavefont does not represent the exact departure of aspheric surface from the reference sphere and causes the measuring errors. The effect of the problem is discussed theoretically.
出处
《应用光学》
CAS
CSCD
1993年第3期61-64,共4页
Journal of Applied Optics
关键词
非球面
干涉仪
干涉测量法
误差
aspheric surface
measurement
interferometric testing
