摘要
本文获得了喷砂制造热解石墨栅极时,喷射砂束在石墨圆筒表面上单向刻蚀轨迹的数学表达式。并用几何图形描述了石墨圆筒表面上刻蚀轨迹的几种情况。
In this paper,we derive the mathematical formula of the trace unidirectionally etched with the grit beam on the surface of graphite pot for making pyrolytic graphite grid.A number of traces etched on the surface of graphite pot are described diagrammatically.
出处
《真空电子技术》
北大核心
1993年第1期25-29,共5页
Vacuum Electronics