摘要
研究了φ２００ｍｍ及φ４１０ｍｍ轻型结构球面石英反射镜的光学稳定性。φ２００ｍｍ轻型石英反射镜经两次高温２００℃，低温－４０℃实验及两年时效研究，用ＺＹＧＯＭａｒｋⅣ干涉仪测量均方根误差及变化。对φ４１０ｍｍ轻型熔石英反射镜进行高温１５０℃、低温－３５℃实验。实验结果表明，均方根值变化均小于０．０１λ（λ：６３２．８ｎｍ），具有满足要求的光学稳定性。
The optical stabilities of φ200mm and φ410mm of lightweight spherical quartz mirrors are studied. After two times of ageing of 200℃ high temperature and -40℃ low temperature for two years, the RMS error of the φ200mm lightweight quartz mirror has been tested by ZYGO Mark Ⅳ interferometer. The φ410mm lightweight quartz mirror has been experimented under 150℃ high temperature and -35℃ low temperature. The experimental results show that their RMS variations are less than 0. 01λ(λ: 632. 8nn). Their stabilities can meet the requirements of the items.
出处
《光电工程》
CAS
CSCD
1994年第6期12-19,共8页
Opto-Electronic Engineering
基金
863高技术研究计划资助
关键词
球面镜
石英玻璃
光学特性
稳定性
分析
Spherical mirrors, Quartz glass, Optical properties, Stability analysis.
