摘要
本文介绍了基于半导体激光器线性调频干涉技术的全光纤表面粗糙度传感器的研究，该传感器的灵敏度为０．００５μｍ，量程为４ｍｍ，属微型化传感器，辅之以机械传动机构可完成对复杂曲面表面，沟槽表面及３ｍｍ以上内孔表面的表面粗糙度测量，且结构简单易于实用化。
This paper descrihes the research on optical fiber surface roughness sensor based on linearfrequence modulation interference with laser diode. The sensor is a microsensor with a height resolutionof 0.005μm and range of 4mm. With the help of travellng table,the sensor can complete the texting ofsuface roughness,such as surface of complex curved surface,surface of the trench and the inner sur-rface of complex hole above 3mm in diameter.The contruction of the sensor is very simple,immunityfor electrornagnetic interference and temperature influnce and easy to put into instrument.
出处
《光学技术》
EI
CAS
CSCD
1994年第6期45-47,共3页
Optical Technique
关键词
传感器
线性调频干涉
光纤
表面粗糙度
Lasers
Optical fibers
Optical instruments
Roughness measurement
Surface measurement
Surface properties
