摘要
本文提出了一种可完全消除多齿法中谐波抑制问题的误差分离方法——混合多步误差分离法,并通过计算机仿真对该方法进行了验证。结果表明,混合多步误差分离法可将计算方法的准确度由纳米级提高到亚纳米级。
A kind of error separation method to fully solve the suppression of harmonics, called the error separation method of mixed multistep, is put forward in this paper. This method has been verified by using computer simulation. It is found that the calculating method accuracy may be improved from the level of nanometer to that of sub-nanometer.
出处
《计量学报》
CSCD
1994年第3期223-225,共3页
Acta Metrologica Sinica
基金
航空科学基金
关键词
误差分离
谐波
多步误差分离
Error separation technique
Harmonics
Roundness
Number of orientation