摘要
用离子束辅助沉积方法合成Ｆｅ－Ｎ薄膜，用离子束背散射和Ｘ射线衍射方法分析薄膜成分和结构．结果表明，薄膜的组分（α－Ｆｅ，ζ－Ｆｅ２Ｎ，ε－Ｆｅ（２－３）Ｎ，γ＇－Ｆｅ４Ｎ相等）取决于沉积参数。给出了沉积温度和Ｎ／Ｆｅ原子到达比组成的相区域图．
The composition and structure of the Fe-N films were investigated by RBS and XRD.The results of XRD shown that the films consist of γ'-Fe4N, ε-Fe2-3N and ζ-Fe2N phases or mixture of these phases under different deposition parameters. A phase region diagram in dependence on deposition temperature and N / Fe atomic arrival ratio was proposed.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第6期B273-B276,共4页
Acta Metallurgica Sinica
关键词
氮化铁
离子束
辅助沉积
磁性薄膜
ion beam assisted deposition, iron nitride, magnetic film
