摘要
本文介绍了表面粗度测量的研究动向及各种测量方法目前所达到的水平，并重点评述了扫描型隧道显微镜、光触针、光散射等几种非接触测量方法的特点。
The research trends on the measurement of surface roughness and the levels of each measurement method are presented in this paper.The emphasis focuses on the intro-duction of the characters of non-contact measurement methods such as STM, light stylus method and light scattering method。
出处
《天津理工学院学报》
1994年第1期21-27,共7页
Journal of Tianjin Institute of Technology
关键词
非接触法
测量
表面精糙率
surface roughness non-contact measurement
