摘要
运用ＰＶＤ工艺在Ｍ２高速钢表面沉积了（ＴｉＡｌ）Ｎ涂层，用ＳＥＭ、ＴＥＭ和ＸＲＤ方法对涂层显微组织和结构进行了分析研究，并对涂层的性能进行测试。结果表明，涂层的显微硬度和耐磨性随涂镀时基体温度上升而提高，在ＴＳ＝４８０℃时涂镀效果较佳；也随涂镀时的氮流量有关系，当Ｎｆ＝１２ｍｌ．ｍｉｎ－１时，Ｈｖ可达２４００。
i,Al)N coating was deposited on M2 high speed steel by method of physicl vapor deposition.The microstructure of the coating was analized by method of SEM,TEM and XRD.The coating microhardness and wear-resistant properties increases with the substrate temperature(Ts) and have optimum values as Ts=480℃ .They also have close relationship with the change of nitrogen flow rate in a certain range.Hv can reach up to 2400 as Nf=12ml.min-1
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
1994年第3期55-58,共4页
Rare Metal Materials and Engineering
关键词
PVD
涂层
硬度
耐磨性
氮化物
physical vapor deposition coating hardness wear-resistant properties
