摘要
利用光学力来驱动微型器件是一种新型 MEMS 驱动方式。在几何光学模型近似下,对用TEM00 高斯激光束驱动微型螺旋桨结构的光驱动力和力矩进行了理论计算。光驱动力矩与激光功率成正比,和微器件的结构尺寸以及微器件与工作介质的相对折射率等因素有关,设计微器件时必须同时考虑这三个因素。计算得出激光功率 10mW 时,作用在螺旋转子上的光学驱动力矩为7.4×10-17 N?m,和文献中实验结果基本一致。该方法可以应用在复杂三维微结构的光驱动计算中,对微型转子进行优化设计。
Driving micro-device with optical force is a novel MEMS driving mode. The optical force and torque of a micro-propeller-shaped rotor driven by TEM00 Gaussian laser beam are calculated with a geometric-optics model. The optical driving torque is directly proportional to laser power, and it is also related to the factors such as structural sizes of the micro-device and relative refractive index of the operating media for the micro-device. The above factors must be taken into account when designing a micro-device. The calculation shows that when laser power is 100 mW, the optical driving torque acting on propeller-shaped rotor is 7.4 × 10-17N·m, which is basically consistent with the previously published experimental results. The proposed approach is suitable for other more complicated three-dimensional micro-rotors and helpful to optimum design of micro-rotors.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2005年第3期13-16,共4页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目(50275140
50335050)
关键词
光驱动
微型螺旋转子
几何光学模型
优化设计
Optical driving
Micro-propeller-shaped rotor
Geometric optics model
Optimum design
