摘要
介绍激光跟踪仪精度校验方法。用激光跟踪仪与高精密立式加工中心比对来测量激光跟踪仪在IFM(干涉测量模式)模式下精度,为激光跟踪系统的验收提供依据,同时为激光跟踪仪误差补偿提供数据支持。
The inspection method of laser tracking system is described in this paper. The precision of laser tracking system under IFM (Interferometer) model is measured by the contrast between laser tracking system and vertical machining center. Therefore we attain a theoretical basis for the receiving report of laser tracking system. Meantime we attain useful data of calibrating the laser tracking system.
出处
《仪器仪表用户》
2005年第2期104-105,共2页
Instrumentation
