摘要
叙述了用新的加工工艺－离子刻蚀减薄技术制成的６０～１５０ＭＨｚ超高频基频卫星用晶体谐振器，论述了新的工艺过程及产品技术性能。
This paper introduces the resonators of super high frequency base frequency of60～150MHz for satellite use produced by using new processing technology-technologyof decreasing thickness by ion etching.New technology process and technical performanceof products have been described.
出处
《宇航计测技术》
CSCD
北大核心
1994年第5期38-41,46,共5页
Journal of Astronautic Metrology and Measurement
关键词
离子刻蚀
晶体谐振器
基频
工艺
Ion etching,Crystal resonators,Base frequency,Technology
