摘要
分析了双振镜激光加工中误差产生的原因,并针对每一种误差产生的原因提出了校正补偿的方法。指出扫描加工误差并不是单一原因引起的,而是多种原因共同作用的结果。提出OEF图形控制算法,建立DEA控制模型以及采用高精度扫描控制器可有效地降低激光扫描加工误差,提高加工精度。同时,此误差校正方法同样适合高精度激光多普勒扫描测量系统。
Reasons arousing manufacturing errors were analyzed.And it was introduced that revising methods should be adopted to any error.The errors were aroused not only by single reason but also by all reasons together.By using DEA control model based on OEF geometry algorithm and adopting high precise scanner,laser scanning manufacturing errors is reduced,and manufacturing precision is enhanced effectively.And the revising methods were also adapted to precise laser Doppler scanning measurement system.
出处
《激光与红外》
CAS
CSCD
北大核心
2005年第3期161-163,共3页
Laser & Infrared
关键词
激光加工
振镜扫描
加工误差
OEF图形算法
DEA控制模型
laser manufacturing
galvanometric scanning
manufacturing errors
OEF geometry algorithm
DEA control model
