摘要
MEMS系统设计的节点分析法已经被成功地用于机械或机电耦合器件的仿真,但其无法用于热执行器中热 电耦合问题的分析仿真.本文提出一种通过傅里叶变换使用节点分析法动态分析仿真热执行器中热电耦合问题的方法,并建立了热执行器中基本单元———梁单元的热电耦合模型.这种模型的分析计算结果与有限元软件ANSYS吻合较好.
The nodal analysis method has been applied widely in the coupled electro mechanical area,but it suffers from its difficulties to analyze coupled thermo electrical systems.An efficient approach based on the nodal analysis method is proposed to solve the coupled thermal electrical problem of thermal actuators with Fourier transformation and the coupled thermo electrical model of the basic element for the beam is developed.The approach is then verified in comparison with ANSYS and the results agree well.
基金
国家杰出青年科学基金资助项目(批准号:50325519)~~
关键词
MEMS热执行器
梁单元
热电耦合
节点分析法
MEMS thermal actuator
beam element
coupled thermomechanics
nodal analysis method
