摘要
综述了目前国内外薄膜温度传感器敏感功能膜的制备方法、分类、结构、性质等,着重阐述了金属温度敏感膜的研究现状,并详细介绍了高温薄膜温度敏感器件的研究进展,最后论述了薄膜温度敏感器目前需要解决的一些问题。
The current status and prospect of sensitive functional films in thin-film temperature sensors are introduced,including fabrication technologies,classification,structure,property and so on.Some new promising tem- perature sensitive films,especially metal sensitive functional films are discussed,and the development status of thin- film high temperature sensors are also introduced in detail.Moreover,the technical problems in this field are discussed in this short review.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2005年第4期67-70,共4页
Materials Reports
基金
国家自然科学基金(60171043
60371046)
