摘要
建立了等效单层梁模型和一维集总模型,用经典力学理论和传输矩阵方法模拟了多层材料构成且具有四臂固支梁结构的1. 55μmSi基MOEMS(Micro Opto Electro Mechanical Systems)可调谐滤波器的调谐特性
An equivalent single layer model, as well as one-dimensional spring-mass-capacitor model, has been built up, to simplify the electrostatic analysis of multiple-layer fixed-fixed beam of 1.55 μm Si-based MOEMS tunable optical filters. The effects of the structure parameters of the beams, the electrode geometry and initial air gap to the tuning coefficient, have been analyzed. The tuning characteristics have been simulated quantitatively with the classical mechanical theory and transfer matrix methods. The simulations fit in well with the experimental results.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第4期525-528,共4页
Acta Photonica Sinica
基金
国家重点基础研究发展规划(973项目G2000036603)
863高技术发展计划( 2002AA312010 )
国家自然科学基金(No. 90401001)
