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MEMS微波功率传感器的研究与进展 被引量:3

Research and Progress of MEMS Microwave Power Sensor
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摘要 介绍MEMS微波功率传感器的研究与发展,包括自加热式、间接加热式、插入式和电容式微波功率传感器。文中以共面波导(CPW)、负载电阻和热堆作为微波功率传感器的基本单元,对这些基本单元分别作了分析,并给出了这些基本单元和总体结构的性能指标,同时介绍了Si和GaAs衬底上制备微波功率传感器的主要工艺。 This paper introduces the research and progress of the MEMS microwave power sensors, whose types include the self-heating type, the indirectly-heated type, the insertion type and the capacitive type. The coplanar waveguide transmission line, the terminal resistors and the thermopile are analysed, which are basic elements of the sensor. The performances and fabrications of the microwave power sensors are described, which are based on Si and GaAs processes.
出处 《微波学报》 CSCD 北大核心 2005年第2期63-70,共8页 Journal of Microwaves
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参考文献23

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同被引文献23

  • 1廖小平,范小燕.间接加热终端式MEMS微波功率传感器的温度模拟[J].微纳电子技术,2005,42(12):566-570. 被引量:1
  • 2黄从朝,黄庆安,廖小平.一种新型MEMS微波功率传感器的理论模型与优化设计[J].传感技术学报,2006,19(05B):1938-1944. 被引量:10
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  • 5Dehe A, Fricke K, Krozer V. Broadband thermoelectric microwave power sensors using GaAs foundry process [ A]. IEEE MTT-S International Microwave Symposium Digest[ C], 2002. 1829-1832.
  • 6Fernandez L J, Sese J, Flokstra J, et al. Capacitive MEMS application for high frequency power sensor[ A]. Proceedings of Micromechanics Europe[ C] , 2002.
  • 7Fernandez L J, Visser E, Sese J, et al. Radio frequency power sensor based on MEMS technology [ A ]. Proceedings of IEEE Sensors Conference[ C] , 2003. 549-552.
  • 8Vaha-Heikkila T, Kyynarainen J, Oja A, et al. Capacitive meres power sensor [ A ]. Proceedings of 3rd Workshop on MEMS for millimeterwave Communications[ C], 2002.
  • 9Vaha-Heikkila T, Kyynaraineu J, Dekker J, et al. Capacitive RF MEMS power sensors [ A ]. Proceedings of 3rd ESA Workshop on Millimeter Wave Technology and Application: circuits, system, and measurement techniques [ C ] , 2003. 503-508.
  • 10Fernandez L J, Wiegerink R J, Flokstra J, et al. A capacitive RF power sensor based on MEMS technology [ A ]. Journal of Micromechanics and Microengineering [C], 2006, 16:1099-1107.

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