摘要
介绍一种新型的磁悬浮平台,由于该直线电机驱动的磁悬浮平台的推力系统是一个多变量、非线性、强耦合的对象.为了达到较好的控制效果,应用逆控制算法,对它进行解耦控制,使其成为无耦合的三个子系统.然后根据线性系统理论进行主通道控制器的设计.同时配以速度前馈控制器来改善动态性能.仿真实验结果表明,这种控制方案达到解耦的效果,有良好的动态、静态特性,满足半导体微细加工、电路板制造、微组装系统、高速贴片等高精度定位的场合.
A novel magnetic suspension planar stage is presented and a decoupling approach based on inverse control is employed for the thrust system of magnetic suspension platform.The system is nonlinear,(multivariable) and strong coupling and the proposed method makes the complicated system become simple and (linear).To improve the dynamic response,the feedback control is used.The simulation results indicate the (proposed) scheme has better dynamic and static characteristics and decoupling can be realized.The results meet the needs in semi-conductor processing,circuit board manufacturing and micro-assembling system.
出处
《沈阳工业大学学报》
EI
CAS
2005年第2期183-186,共4页
Journal of Shenyang University of Technology
基金
国家自然科学基金资助项目(50070507)
关键词
磁悬浮平台
逆控制
前馈控制
直线电机
精密定位
magnetic suspension platform
inverse control
feedback control
linear motor
precision positioning
