期刊文献+

一种新型的角速率传感器——声表面波陀螺 被引量:2

A Novel Angular Rate Sensor - Surface Acoustic Wave Gyroscope
下载PDF
导出
摘要 声表面波(SAW)器件具有无源、无线、微型、抗冲击力强,灵敏度高等优点。用它制作角速率传感器——SAW陀螺已成为研究热点。概述了SAW陀螺的应用及发展;着重分析了SAW陀螺两种结构模式的工作原理;指出SAW陀螺设计的关键是如何得到合适的参考振动速度,而使其省掉悬浮振动机构成为简单的单平面结构;提出了亟待研究解决的几个问题。 Surface acoustic wave device has outstanding advantages such as passive,wireless, miniature, high resistibility with impact, high sensitivity, etc. The SAW angular rate sensor (SAW gyroscope) has already become the focus under study.This paper sums up the application and development of SAW gyroscope,putting more emphasis on the operation principle of two kinds of structure modes of SAW gyroscope.The key problem of SAW gyroscope design is how to obtain the speed of vibration is pointed out,so that it can eliminate the suspending part,nary vibratory micro-gyroscope,and becomes simple plane structure accordingly.Finally several problems that and solved are proposed in this paper.
出处 《压电与声光》 CSCD 北大核心 2005年第3期250-253,共4页 Piezoelectrics & Acoustooptics
基金 航天部科技创新基金
关键词 SAW 角速率传感器 陀螺 哥氏力 surface acoustic wave angular rate sensor gyroscope Coriolis force
  • 相关文献

参考文献6

  • 1吕志清,胡爱民.MEMS-IDT声表面波陀螺[J].微纳电子技术,2003,40(4):27-29. 被引量:6
  • 2VARADAN V V, VARADAN V K. MEMS-IDT based micro accelecrators and gyroscope[C]. Royal Pines Resort, Queensland, Aurtualia: 1999 SPICE comference on Electronics and Structures for MEMS, 1999,891(3):134-144.
  • 3WOODS R C, KALAMI H, JOHNSON B. Evealuation of a novel surface acoustic wave gyroscope [J].IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2002,49 (1) : 136-141.
  • 4KUROSAWA M, FUKUDA Y, TAKASAKI M, et al. A saface-acoustic-wave gyro sensor[J]. Sensor and Actuators, 1998, A66: 33-39.
  • 5VARADAN V K , SUH W D , XAVIER P B , et al .Design and development of a MEMS-IDT gyroscope[J]. Smart Mater Struct, 2000,9 : 898-905.
  • 6JOSE K A, SUH W D, XAVIER P B, et al. Saface acoustic wave MEMS gyroscope [J] .Wave Motion ,2000, 36:367-381.

二级参考文献1

  • 1中村夫 立川肇 大川修治.角速度计测装置[P].特许公报.平5-52884..

共引文献5

同被引文献10

引证文献2

二级引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部