摘要
报道了一种新型压电线性激励器,设计出它的结构,完成了器件制作。设计测试系统对其性能进行测试。器件的线性步进位移特性明显,具有步进模式和连续线性位移模式。行程可达几个厘米、位移分辨率为0.1μm、运行速度可达0.6mm/s。激励器结构简单,控制方便,适于研制闭环控制高精度定位系统。
A novel linear piezoelectric actuator is reported in this paper.Configuration of the actuator is designed and the character of which is tested.A testing system is designed.The linear stepper movement of the actuator is distinguished and its two model of movement have been found: stepper model and serial displacement model. The range of the actuator can be several centimeters; its resolution is 01 μm in the existed testing system; its velocity can be 0.6 mm/s; its configuration is sample and can be controlled easily. This actuator may be used in study of high precision closed loop control positioning system.
出处
《压电与声光》
CSCD
北大核心
2005年第3期263-266,共4页
Piezoelectrics & Acoustooptics
关键词
激励器
光栅测试系统
纳米压电马达
闭环控制
actuator
grating test system
piezoelectirc nanomotor
closed loop control
