摘要
针对激光气相合成氮化硅纳米粉体的性能与成本的矛盾,在对激光合成反应物的研究与分析的基础上,选择廉价、无氯硫、对CO2激光有强吸收、易于处理的有机硅烷反应物六甲基乙硅胺烷(HMDS)作为价格昂贵、难以处理的硅烷(SiH4)的替代反应物,进行了激光合成氮化硅纳米粉体的研究。
The preparation of silicon nitride nano-powders with laser induced HMDS was studied. Aimed at settlement of the contradiction between performance and powder cost, cheap, chlorine and sulphur-free organic silanes with a strong CO2 laser absorption have been selected as alternative reactants, instead of the high cost and hardly handled silanes gas.
出处
《光电子技术与信息》
2005年第3期10-13,共4页
Optoelectronic Technology & Information
关键词
激光诱导化学气相合成
六甲基乙硅胺烷
氮化硅纳米粉体
laser induced chemical vapor synthesis(LICVD)
Hexamethyldisilazane(HMDS)
silicon nitride nano-powders
