4LI Dai-zong, YU Zhuo, CHEN Bu-wen, HUANG Chang-jun, LEI Zhen-lin, YU Jin-zhong, WANG Qi-ming (State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083,CHN).Comparison of Ge_xSi_(1- x) Grown by UHV/CVD from Si_2H_6/GeH_4 and SiH_4/GeH_4[J].Semiconductor Photonics and Technology,1999,5(3):134-138. 被引量:1