摘要
介绍了抛光盘机械结构和基本运动方式,探讨了主动抛光盘的控制系统和面形检测,重点对变形技术进行了数学分析,并给出了实验结果。根据实验结果分析了面形误差产生的原因,讨论了主动抛光盘的动态响应和校正,给出了直径910mm,焦比为F/2的实验镜面磨制结果。
The mechanical construction and basic movement mode of the lap are introduced and the control system was exploited. Distortion technology was analyzed from math theory aspect and the experiment result was given. According to the result, the reason of distortion error was analyzed and the dynamic response and emendation problem were discussed. The testing results on applying the lap on φ 910 mm, with f/2 paraboloidal mirror were given.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第3期373-375,379,共4页
Optical Technique
基金
国家自然科学基金重点项目(19633020)
关键词
主动抛光盘
非球面镜面
计算机控制
active stressed lap
aspherical mirror
computer control
