摘要
介绍了共振隧穿器件及其特点,论述了该类器件及其集成技术的发展趋势和最新进展,特别是SiO 2S/iS/iO 2共振隧穿二极管及其集成电路的研制成功是一个突破性的进展。
Resonant tunneling devices and its features were introduced.The development trend and new progress on resonant tunneling devices and its integration were discussed.In the new progress,particularly,the fabrication of the SiO2/Si/SiO2 resonant tunneling diode and its integration circuit is a advance progress in this area.
出处
《微纳电子技术》
CAS
2005年第7期298-304,共7页
Micronanoelectronic Technology
基金
天津市应用基础研究重点项目资助(043800811)
关键词
共振隧穿二极管
共振隧穿三极管
集成电路
resonant tunneling diode(RTD)
resonant tunneling transistor(RTT)
IC