摘要
研究了氧化铈抛光液颗粒浓度和pH值的变化对抛光液悬浮性能、接触角和粘度的影响。结果表明:随着浓度和pH值的变化,氧化铈抛光液悬浮性能、接触角和粘度均出现变化。随着原始抛光液被逐渐稀释,抛光液的悬浮性能下降,接触角和粘度也减小,然而pH值的变化对它们的影响则较为复杂。
The effect of pH value and solid concentration on the properties of cerium oxide slurry was studied,such as stability,contact angle on Si (100) surface and viscosity number.The experimental results show,with reducing the solid concentration of the original slurry,the stability of the slurry becomes worse and the contact angle and viscosity number decreases.However,the influence of pH value on these properties of slurry appears more complex.
出处
《润滑与密封》
CAS
CSCD
北大核心
2005年第4期9-11,共3页
Lubrication Engineering
基金
国家自然科学基金重大资助项目(50390060).
关键词
氧化铈抛光液
颗粒浓度
PH值
稳定性
cerium oxide slurry
solid concentration
pH value
stability
