摘要
在添加羧酸和有机化合物的硫酸电解液中,采用阳极氧化的方法制备了电路铝基板衬底,研究了电流密度和氧化时间对氧化膜厚度和硬度的影响。利用X射线,SEM分析了氧化膜的物相组成和表面微观结构,并对其电绝缘性能进行了测试。结果表明,所获得的氧化膜是由非晶态的Al2O3以及少量晶态-γAl2O3组成,呈致密的网状结构,其电学性能满足基板的要求。
Power substrate was prepared by aluminium anode oxidation in sulfuric acid electrolyte which consists of carboxylic acids and organic compounds. The effects of current density and oxidation time on thickness and hardness of the obtained anodic oxidation film were studied. The components and surface microstructure of the oxide film is analyzed by X-ray and SEM. Its power insulated is measured. The results show that oxidation film is composed of noncrystal Al_2O_3 and a little of crystal γ-Al_2O_3, it shows itself compact network, its electricity performance meets the request of power substrate.
出处
《新技术新工艺》
2005年第7期51-53,共3页
New Technology & New Process
关键词
阳极氧化
铝
绝缘基板
<Keyword>anode oxidation, aluminium, insulated substrate
