摘要
为了提高光学衍射法细圆柱体直径测量精度,用递归法建立了更精确的改进模型。运用改进模型测量细圆柱体直径时,克服了传统测量模型由衍射角引起的原理误差,提高了测量精度。光源的波长误差、暗条纹位置误差和透镜焦距调整误差均会产生测量不确定度,使用改进模型时的计算值分别为0.024μm,1.920μm和0.529μm。细圆柱体直径测量实验结果表明,基于改进模型的光学衍射法的相对测量误差在0.5%以下,优于目前1%的水平;测量不确定度小于2μm,与理论分析相一致。
To improve measurement accuracy of thin cylinder's diameter by optical diffraction, an improved model is established with recursive method, which is more accurate. Theoretical error of customary model created by diffraction angle is eliminated so that the measurement accuracy is improved when the diameter is measured with the improved model. The uncertainty of measurement is created by three cases, namely the wavelength error of light source, position error of dark fringe and adjustment error of focal length of lens. The uncertainty errors due to above three cases are 0.024 μm, 1.920 μm and 0.529 μm respectively calculated with the improved model. Experimental results show that the relative measurement error is less than 0.5%, which is better than the present level of 1%, and uncertainty of measurement is less than 2 μm, which agrees well with theoretical analysis.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2005年第7期55-58,共4页
Opto-Electronic Engineering
基金
国防计量"十五"计划重点项目
关键词
直径测量
圆柱体测量
夫琅和费衍射
测量误差
Diameter measurement
Cylindrical measurement
Fraunhofer diffraction
Measuring errors
