摘要
分析激光板凸度检测原理,根据测量间隙参数的变化,建立检测系统传感器位置状态表,将系统中传感器的位置关系分为正间隙、有效负间隙、无效负间隙三类。三种关系下系统的测量范围分别为:1)4mm以上;2)0-4mm;3)不能测量。由此提出一种传感器位置调节方法,以位置状态表作为调节判据,运用伺服跟踪技术,在检测过程中使传感器自动处于最佳的位置关系,实现检测的智能化。差动式厚度试验表明,本方法具有高效、精确、自动化程度高的特点,位置调节精度达到±1μm。
The measuring principle of differential sheet convexity measurement is analyzed. Base on the variations of measuring spaces, the chart of status for laser sensor positions is built. The position relationships of the sensor can be divided into three cases, namely the positive space, valid negative space and invalid negative space, which correspond to different measurement ranges: 1) 4 mm upward, 2) 0-4 mm, 3) out off measurement accordingly. A position adjustment method for the sensor is put forward to make the sensor at optimal positions during sheet convexity measuring process based on the chart of status and servo tracking technique, thus enabling whole measurement intelligently. Experiment of differential thickness measurement shows that the method has the advantages of efficiency, precision and high-automation. The position adjusting accuracy of the system reaches +/-1 μm.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2005年第7期93-96,共4页
Opto-Electronic Engineering
基金
国家863项目
关键词
板凸度检测系统
三角测量
激光位移传感器
厚度测量
Sheet convexity measuring systems
Triangulation measurement
Laser displacement sensors
Thickness measurement
