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基于MEMS共面波导腔的带阻滤波器的设计

Design of MEMS Coplanar Waveguide Cavity Bandstop Filter
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摘要 应用计算机辅助设计了一种基于共面波导结构的MEMS带阻滤波器。研究了微尺度电磁学、力学、温度等效应。利用ANSOF的HFSS软件模拟分析了滤波器的损耗参数,并应用ANSYS软件分析复合结构的热应力分布,得出了阻带中心频率在18GHz的MEMS带阻滤波器件,提供了一些有意义的理论分析及应用。 A novel bandstop filter of MEMS CPW (coplanar waveguide) cavity is designed by computer-aided design (CAD) method. Microscale electromagnetism, mechanics and temperature are studied. The MEMS filter loss of CPW is simulated using ANSOFT HFSS software. The thermal stress of MEMS complex structure is also analyzed by ANSYS software. Significant simulation results and academic analyzing of the MEMS CPW filter,band-stop center frequency at 18GHz, are obtained.
作者 赵继德 李应良 马传龙
机构地区 烟台师范学院物理与电子工程学院 华信邮电咨询设计研究院有限公司 重庆通信学院
出处 《半导体技术》 CAS CSCD 北大核心 2005年第8期34-37,共4页 Semiconductor Technology
关键词 射频微机电系统 滤波器 共面波导 阻带 微尺度效应 RF MEMS filter CPW band-stop microscale effect
分类号 TN713.5 [电子电信—电路与系统] TN402 [电子电信—微电子学与固体电子学]
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参考文献8

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二级参考文献22

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半导体技术
2005年 第8期

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