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纳米压痕硬度尺寸效应的残余面积最大压深模型 被引量:11

RESIDUAL AREA MAXIMUM DEPTH MODEL OF INDENTATION SIZE EFFECT OF NANOINDENTATION HARDNESS
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摘要 针对材料在纳米压痕硬度测试实验中出现的压痕尺寸效应,通过对单晶硅的纳米压痕实验,得到压痕的真实最大压深,再利用原子力显微镜获得压痕的三维形貌,并结合Matlab软件得到压痕的真实残余面积。以残余面积和最大压深为变量,提出了一种新的描述硬度压痕尺寸效应的模型———残余面积最大压深模型,此模型能更好地描述和理解纳米压痕硬度的尺寸效应。 In order to research the indentation size effect (ISE) in the material nanoindentation hardness test, a single silicon crystal was used in nanoindentation experiments to get maximum depths. Combining Matlab software and the 3 dimensional morphology of nanoindentation obtained by an atomic force microscopy (AFM), the real residual areas were obtained. Based on the maximum depth and the residual area, a new model-residual area maximum depth model is proposed for indentation size effect on nanoindentation hardness. The model can understand and describe ISE in nanoindentation hardness better than other models.
出处 《硅酸盐学报》 EI CAS CSCD 北大核心 2005年第7期817-821,共5页 Journal of The Chinese Ceramic Society
基金 国家自然科学基金(59571263) 霍英东基金资助项目。
关键词 压痕尺寸效应 残余面积最大压深模型 原子力显微镜 硬度 单晶硅 Atomic force microscopy Computer software Hardness Silicon Single crystals
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