摘要
本文介绍了四连杆系统、三自由度平台等微机械组件的设计和研制．叙述了微加工工艺过程，提出了工艺难点和解决方法．据实际实验尺寸分别对四连杆和平台的运动特性作了数值模拟．该平台占地约０．２ｍｍ２，最大工作区域为０．０２ｍｍ２．研制成的四连杆、平台及其它几种尺寸的单连杆均可在外力拨动下灵活地旋转或迁移．
This paper introduces the design and fabrication of a four-link system and athree-degree-of-freedom platform. The Micro fabrication processes, including difficulties and solving methods, are described. The kinematic characteristics of thefour links and the platform are simulated numerically in the fabricated size. Theoccupied space of the platform is about 0. 2 mm2, while its workspace is 0. 02mm2. All these micromechanical components and systems can rotate or movefreely under outside forces.
出处
《上海大学学报（自然科学版）》
CAS
CSCD
1995年第1期85-90,共6页
Journal of Shanghai University:Natural Science Edition
关键词
平台
微加工
多晶硅
连杆
微电子机械系统
integrated circuit technology
mechanical systems
platform
micromechanism
microfabrication
