摘要
本文从理论上和实验上对硅压阻式加速度传感器的三种结构：悬臂梁、四梁和双岛－五梁的空气阻尼问题进行了研究．在这三种结沟中，四梁结构的质量块具有平行的运动方式，但是悬臂梁和双岛－五梁结构中的质量块既有平动又有转动，对这种非平动状态的空气阻尼的分析尚未见报道．本文从决定平板运动阻尼特性的Ｒｅｙｎｏｌｄｓ方程出发。在平板平动情况解的基础上推导了非个动板的阻尼力以及双面阻尼的阻尼力．用这些结果对三种结构进行了单面和双面阻尼设计，实验结果与理论分析相符．
Abstract The damping characteristic analysis of three structures of silicon piezoresistive accelerometers: cantilever beam, quad--beam and twinmass five-beam structures are discussed. The solutions to single side and double side damping coefficients for parallel movement of a quad-beam structure and non-parallel movement of another two structures have been obtained. Based on these analyses, single-sided and double-sided damping structures are designed. The experimental results agree quite well with analytical results.
基金
国家自然科学基金
传感技术国家重点实验室项目
