摘要
介绍了采用多弧离子镀的方法在新型热作模具钢（ＣＨ７５）表面沉积（Ｔｉ，Ａｌ）Ｎ薄膜的制备工艺，讨论了工艺参数对（Ｔｉ，Ａｌ）Ｎ薄膜性能的影响。对Ｔｉ／Ａｌ机械复合靶进行了结构设计，得出靶的名义Ａｌ含量与沉积的（Ｔｉ，Ａｌ）Ｎ薄膜的Ａｌ含量相符合。
Deposition technique of(Ti,Al)N Film by Multi-arc ion plating on CH75 hot die steel was intrcduced in this paper.The influence of technologic parameter on property of(Ti,Al)N film was discussed.The structure of Ti/Al mechanic compound targets were designed and its content Of Al was shown no difference to(Ti,Al)N content of Al.
出处
《兵器材料科学与工程》
CSCD
北大核心
1995年第5期25-29,共5页
Ordnance Material Science and Engineering
基金
国家教委博士点基金重点
关键词
薄膜
多弧离子镀
金属
表面处理
Ti,Al)N film,multi-arc ion plating,mechanic compounc target,solvent clean
