摘要
脊形单模硅光波导的设计韩关云（天津大学电子系天津市３０００７２）摘要对脊形单模硅光波导的模式特性进行了理论分析。设计了γ＝１．３μｍ的脊形硅光波导的结构参数及工艺流程。这种光波导的数值孔径和单模光纤匹配，传播损耗低于平面条形硅光波导。文中并对传播损耗...
Mode characteristics of silicon ridge waveguide with single-mode were analysed theoreticaly. The structure parameters and the fabrication technological process of the waveguide at λ=l.34μm were designed. The numerical aperture of the waveguide is matched to a single-mode fiber and the propagating loss of the waveguide is lower than a rectangular silicon waveguide. Besides, the propagating loss of the waveguide is atso disscussed.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
1995年第2期79-82,87,共5页
Journal of Optoelectronics·Laser
关键词
脊形
单模
硅
光波导
设计
All-silicon technique, Ridge waveguide.
