摘要
现代科学技术的发展，在许多领域中提出了加工超光滑表面的要求。这种表面不仅要具备较高的面形精度和极低的表面粗糙度，同时要具有完整的表面晶格排布，消除加工损伤层。近年来国际出现了不少成功的超光滑表面加工技术，可以实现表面粗糙度小于１ｎｍ，面形精度优于３０ｎｍ。本文介绍了超光滑表面的主要应用领域；从去除机理的角度讨论了ＢＦＰ抛光、Ｔｅｆｌｏｎ抛光、离子束加工、ＰＡＣＥ加工、浮法抛光、延展性磨削等六种有代表性的超光滑表面加工技术；并对国内情况作了简单分析。
Elements with supersmooth surfaces are demanded in many fields along with thedevelopment of modern science and technology, which present high contour accuracy,extremely Iow surface roughness,perfect crystalline distribution and nondamaged layers.Lots of new fabricating techniques have been applied to obtain supersmooth surfaces withsurface roughness < 1 nm and contour accuracy < 30 nm,This paper introduces theapplication of such surfaces,and from the point of stock removing mechanism,discusses 6different superpolishing techniques. Bowl Feed Polishing,Teflon Polishing,Ion Beanfiguring, Float Polishing,Plasma Assisted Chemical Etching,Ductile Grinding.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第4期7-14,共8页
Optics and Precision Engineering
关键词
超光滑表面
超精密加工
抛光
Supersmooth surface,Ultraprecision machining,Polishing
