摘要
采用分子束外延方法制作低损耗Ｓｉ１－ｘＧｅ／Ｓｉ异质结脊形光波导，在Ｘ型交叉波导上实现了Ｓｉ１－ｘＧｅｘ／Ｓｉ光分支器的功能．设计中采用了ＳｉＧｅ大截面脊形波导的单模条件和交叉波导传输特性分析的结果．Ｘ型光分支器的实现为进一步研制Ｓｉ１－ｘＧｅｘ／Ｓｉ光开关和光电调制器积累了经验．
Based on the realization of low loss Si1-xGex/Si single-mode rib waveguides,we developed the Si1-xGex/Si 'X' branches with the cross waveguides. These structures were fabricated from SiGe grown by molecular beam epitaxy (MBE). The branchesdemensions are determined by Si1-xGex/Si large single-mode conditions and propagationfeatures of the 'X' cross waveguides using the beam propagstion and effective indexmethod.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第2期252-254,共3页
Acta Optica Sinica
关键词
异质结
脊形波导
X型
波导
分支器
锗
硅
Si_(1-x)Ge_x/Si hetero-junction, rib waveguide, branches.
