摘要
研制出一种采用激光扫描与ＣＣＤ探测系统的大型工件平行度、垂直度测量仪，它以稳定的准直激光束为测量基线，配以回转轴系，旋转五角棱镜扫出互相平行或垂直的基准平面，将其与被测大型工件的各面进行比较。在加工或安装大型工件时，可用本仪器测量面间的平行度及垂直度。本仪器采用ＣＣＤ光电探测系统及单片机，直接测出被测点相对于基准平面相应点的高度变化值，最后由计算机根据高度变化值算出平面度、平行度及垂直度，仪器的测量误差在８ｍ以内不大于１７．６μｍ。探测器的高度探测范围为１０ｍｍ。
A stable collimated laser beam is used as a measuring datum in the instrument with rotating shafts and pentagonal prisms. The datum planes built with the laser beams parallel or perpendicular to each other are compared with the surfaces of large workpieces to be tested. Parallelism and perpendicularity of surfaces are measured while manufacturing or assembling a large workpiece. By using a CCD detector system and a single chip processor in the instrument, the deviation of height related to the datum plane at the corresponding point is measured directly. Finally, flatness, parallelism and perpendicularity are calculated according to the deviation values by a computer.The measurement error of the instrument is less than 17.6μm in 8m range and the detectable height range of CCD detector is 10mm.
出处
《计量学报》
CSCD
1995年第1期26-30,共5页
Acta Metrologica Sinica
关键词
激光扫描
平行度
垂直度
CCD探测器
形位公差
Laser scanning
Large workpiece
Parallelism
Perpendicularity
CCD detector
