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硅酸镓镧晶体声表面波压力敏感特性研究 被引量：4

Study on the Pressure Sensitive Characteristics of New Piezoelectric Crystal La_3Ga_5SiO_(14)
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摘要 针对采用新型压电材料硅酸镓镧(LGS)研制声表面波高温压力传感器的需要,利用微扰理论对LGS在双旋转平面内的压力敏感特性进行了理论分析,以等高线的形式给出了LGS在二维旋转平面内的压力对敏感系数.结合温度及机电耦合特性,优化出了适合压力传感器的切向范围,并对欧拉角为(0,150°,22°)的切向基片的压力敏感特性进行了实验研究.验证了谐振频率的变化与外界压力成线性关系,且理论与实验结果趋势基本一致. For the research of SAW （Surface Acoustic Wave） pressure sensors using new piezoelectric crystal La3Ga5SiO14 （LGS）, this paper investigated the pressure sensitive characteristics of LGS in double rotated plane using perturbation theory, and presented the pressure sensitive coefficients with the aid of contour plots. Considering the temperature and electromechanical coupling characteristics, the optimal propagation and cut directions range of SAW substrate for pressure sensor were found out. To the substrate defined by Euler angle （0,150°, 22°） , the pressure sensitive characteristics were investigated through experimentation, which validates that the shift of resonance frequency is in good linearity with applied pressure, and the experimental results nearly agree with the analytical one.
作者 吉小军 施文康 韩韬 张国伟
机构地区 上海交通大学信息检测技术与仪器系
出处 《上海交通大学学报》 EI CAS CSCD 北大核心 2005年第7期1136-1139,共4页 Journal of Shanghai Jiaotong University
关键词 硅酸镓镧 压力传感器 微扰理论 压力敏感切向 La3Ga5SiO14 （LGS） pressure micro-sensor perturbation theory sensitive cuts for pressure
分类号 TH703.2 [机械工程—精密仪器及机械]
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参考文献9

  • 1张晓群,吕惠民.压力传感器的发展、现状与未来[J].半导体杂志,2000,25(1):47-50. 被引量：22
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二级参考文献10

  • 1[1]Hiroaki Satoh, Atsushi Mori. Surface acoustics wave propagation characteristics on a langasite crystal plate [J]. Jan J Phys Appl,1997,36(5B):3071-3073.
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共引文献24

同被引文献59

引证文献4

二级引证文献26

上海交通大学学报
2005年 第7期

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