摘要
本文选择非极性溶剂AcAc在大气中保护金属酸盐制备钛锆酸铅(PZT)铁电体薄膜,当PZT<0.5mol/L时可生成稳定溶胶,PZT能均匀分散在溶剂中,在400℃除去残余有机物,然后在400~700℃使薄膜晶化生成钙钛矿结构为主的多晶薄膜.本文利用XRD、TEM、IR及热分析技术对PZT薄膜的形成及晶化等变化进行了分析和探讨.
PZT ferroelectric films were prepared from corresponding metal alkoxide partially stabilized with acetylacetone through the sol-gel solution. The films were heat-treated at 400℃ for decomposition of residual organics and then at 500℃~700℃ for crystallization of the films. The formation and crystallization of PZT films were studied by using XRD, TEM, IR, TGA, DTA.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1995年第1期113-116,共4页
Journal of Inorganic Materials