摘要
以声表面波气体、温度和压力传感器为例，介绍了国外声表面波传感器的开发近况。指出了开发的重点、难点及今后的发展方向。
Taking SAW sensors of gas,temperature and pressure as enamples,this paper pre-sents the up- to-date devehpments of SAW sensors at abroad.The technical problems,key points and the future trends of SAW sensors are also described in this paper.
出处
《压电与声光》
CSCD
北大核心
1995年第4期6-10,共5页
Piezoelectrics & Acoustooptics
关键词
声表面波
气体传感器
温度传感器
压力传感器
SAW gas sensors,SAW temperature sensors, SAW pressure sensors, detection principle
