摘要
扩散泵的返油限制了它的使用范围。用挡油障板阻挡油分子的同时，又将减小泵的抽速，这是一个矛盾。本文给出一种测量扩散泵返油率在泵口平面分布的方法。对返油率高的部分加以有效的阻挡，而低的部分留作抽气通导，这对设计低返油、大通导的挡油障板无疑是一种启迪。
AbstractThe reflux of a diffuxion pump limits the pump's range fo use.An oil baffle may stop the flowof oil,but at the same lime,lower the pumping speed. This is a contradiction.In this artcile away is presented which measures the distribution of a diffusion pump's backflow over the surfaceof the pumping hole.In this way tile high-rate reflux may be efficiently checked while the low-ratereflux can be used as the passage of airbleed.It is doubtless that we can draw inspiration fromwhat is mentioned above to design an oil baffle with low reflux and smooth passage.
出处
《真空》
CAS
北大核心
1995年第2期5-8,共4页
Vacuum
