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多层导电结构厚度电涡流检测正向模型及仿真器研究 被引量：2

Forward Model and Simulator of Thickness Measurement of Multi-Layered Conductive Structures by Eddy Current Technique
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摘要 首先推导出有限截面圆柱形线圈置于多层导电结构上方时,各种参数与阻抗变化关系的数学模型;接着研究该正向模型的求解方法和计算技术,并建立了一个多层厚度电涡流检测仿真器,仿真计算了单层板、金属基体上导电涂层厚度以及多层导电结构板间间隙检测时待测厚度值变化导致的探头阻抗响应值,分析了变化规律,并进行了实验验证。仿真器的仿真结果可为实际检测系统参数设计提供理论依据,且可在基于模型的反演算法中提供正向解。 The impedance change model of a probe coil above a structure with an arbitrary number of parallel layers is put forward. The solving method and calculation procedure of the forward model are investigated and then a simulator for the thickness measurement of multi-layered structures is established. The simulation results of thickness measurement of single layer, 3 layers and 4 layers are calculated using the simulator and the trends of the impedance and thickness change curves are analyzed. The merits of the forward model and simulator are proofed by the experimental results.
作者 黄平捷 张光新 吴昭同 周泽魁
机构地区 浙江大学 浙江大学
出处 《传感技术学报》 CAS CSCD 北大核心 2005年第3期601-606,共6页 Chinese Journal of Sensors and Actuators
关键词 多层结构 导电 厚度 电涡流检测 正向模型 仿真器 反演 multi-layered structures conductive thickness eddy current testing forward model simulator inversion
分类号 TP391.7 [自动化与计算机技术—计算机应用技术] TM13 [电气工程—电工理论与新技术]
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参考文献9

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二级参考文献5

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共引文献16

同被引文献25

  • 1黄平捷,吴昭同,严仍春.多层厚度电涡流检测阻抗模型仿真及验证[J].仪器仪表学报,2004,25(4):473-476. 被引量：17
  • 2黄平捷,吴昭同,郑建才,周泽魁.多层厚度电涡流检测反演算法及实验研究[J].仪器仪表学报,2005,26(4):428-432. 被引量：6
  • 3Yin W, Peyton A J. Thickness Measurement of Non-Magnetic Plates Using Multi-Frequency Eddy Current Sensors [J]. NDT & E International, 2007,40( 1 ) : 43-48.
  • 4Qu Zilian, Zhao Qian, Meng Yonggang, Improvement of Sensitivi- ty of Eddy Current Sensors for Nano-Scale Thickness Measure- ment of Cu Films [ J ]. NDT& E International, 2014,61 ( 1 ) : 53-57.
  • 5Fan Mengbao, Cao Binghua, Yang Panpan et al. Elimination of Lift- off Effect Using a Model-Based Method for Eddy Current Charac- terization of a Plate[J]. NDT&E International,2015,74(9) :66-71.
  • 6Cong Sen, Gang Tie. Uhrasonic Thickness Measurement for Alu- minum Alloy Irregular Surface Parts Based on Spectral Analysis [J]. Transactions of Nonferrous Metals Society of China, 2012, 22 ($2) :323-328.
  • 7Jiang Hui, Zhu Jingtao, Wang Zhanshan, et al. Determination of Layer-Thickness Variation in Periodic Multilayer by X-Ray Re- flectivity [ J ]. Journal of Applied Physics, 2010,107 (10) : 103523.
  • 8Sekine Y, Soyama H. Using an Eddy Current Method with Inverse Analysis to Determine the Thickness of the Layer Modified by Cavitation Peening at the Surface of Type 316 L Austenitic Stain-less Steel[ J ]. NDT & E International, 2012,46(3 ) : 94-99.
  • 9Moulder J C, Uzal E, Rose J H. Thickness and Conductivity of Me- tallic Layers from Eddy Current Measurements [J ]. Review of Sci- entific Instruments, 1992,79 (6) : 3455-3465.
  • 10Tian Guiyun, He Yunze, Adewalea I et al. Research on Spectral Response of Pulsed Eddy Current and NDE Applications [J]. Sen- sors and Actuators A--Physical, 2013,189( 1 ) : 313-320.

引证文献2

二级引证文献9

传感技术学报
2005年 第3期

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