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Si和GaAs衬底上的ZnTe、CdTe分子束外延材料的晶向倾角 被引量:1

Tilted Angels of ZnTe and CdTe Epilayers Grown on Si(211) and GaAs(211)B Substrates by MBE
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摘要 本文采用X射线双晶衍射二次测量法对76mmSi(211)和GaAs(211)B衬底上生长的ZnTe和CdTe外延层的晶向倾角进行了测量,发现对于Si和GaAs衬底,外延层的[211]均绕外延层与衬底的[0-11]复合轴朝[111]倾斜,其晶向倾角与晶格失配呈线性关系;通过实际测量验证了在外延层探测到的[133]峰代表[211]关于[111]旋转180°的[255]孪晶向。 Measurements using X-ray double crystal diffraction(XDCD) were carried out to investigate the tilted angels of ZnTe and CdTe epilayers grown on 76mm Si(211) and GaAs(211)B substrates by molecular-beam epitaxy. The results show that the epilayer' s [211 ] tilts toward [ 111 ] about the [0-11 ] coincidence axis, independent of the substrates employed. Further more, a linear relationship of tilted angles and lattice mismatch between the epilayer and substrate was found. It was also confirmed that [ 133 ] peak of the epilayer corresponds to [255 ], which is the first-order twin of [211 ] about [ 111 ] twist axis.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2005年第4期649-652,共4页 Journal of Synthetic Crystals
基金 国家自然科学基金(No.60221502)资助项目
关键词 分子束外延 晶格失配 晶向倾角 孪晶 MBE lattice mismatch tilted angel twin crystal
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  • 1Lange M D,Sporken R,Mahavadi K K, et al.Molecular Beam Epitaxy and Characterization of CdTe(211) and CdTe(133) Films on GaAs(211)B Substrates[J].Appl. Phys. Lett.,1991,58(18): 1988-1990.
  • 2Sasaki T, Tomono M, Oda N. Study of CdTe Epitaxial Growth on (211)B GaAs by Molecular Beam Epitaxy[J].J.Vac.Sci.Technol.B, 1992,10(4):1399.
  • 3De Lyon T J,Rajavel D, Johnson S M, Cockrum C A. Molecular-beam Epitaxial Growth of CdTe(112) on Si(112) Substrates[J].Appl.Phys.Lett.,1995,66(16):2119-2121.
  • 4Rujirawat S, David Smith J,Faurie J P, et al. Microstructural and Optical Characterization of CdTe(211)B/ZnTe/Si(211) Grown by Molecular Beam Epitaxy[J].Journal of Electronic Materials, 1998, 27(9):1047-1052.
  • 5Yu Fuju .Tilted Angels at the CdTe/Cd1-yZnyTe,Hg1-xCdxTe/CdTe,CdTe/GaAs Heterojuntions Grown by Molecular Beam Epitaxy[J].Journal of Crystal Growth,1999,204:35-40

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