摘要
数值模拟方法是了解晶体生长过程中各种物理现象和问题的重要手段,可以为晶体生长工艺参数的设定、温场设计等提供参考。本文介绍了最近几十年来数值模拟技术对提拉法生长晶体过程中物理问题的研究进展,同时对晶体生长过程中界面形状、液流、速度场、温度场、各种输运过程以及工艺条件和参数对晶体生长的影响等的数值模拟进行了介绍。
The numerical simulation is an important way to understand the physical phenomena and problems during the crystal growth, and can offer directions to set up technological parameters and design temperature fields during the crystal growth ,In this paper, research progress in the numerical simulation for CZ-grown crystals in recent years is reviewed. Meanwhile, the simulations of interface shape, flow pattern, velocity and temperature fields, transport processes, technological conditions and parameters influencing on the crystal growth are introduced.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2005年第4期687-692,共6页
Journal of Synthetic Crystals
基金
国家自然科学基金(No.50472104)资助项目
关键词
提拉法
数值模拟
晶体生长
对流
界面形状
Czochralski method
numerical simulation
crystal growth
convection
interface shape
