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面向代理的半导体生产线建模技术研究 被引量:9

Research on AOCTPN based modeling technology of semiconductor fabrication line
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摘要 为了有效分析和评价基于多代理的半导体生产线调度与控制性能,提出了面向代理的有色赋时 Petri网的半导体生产线建模方法。将设备代理内部行为进行封装,建立了设备代理的有色赋时 Petri网模型。同时,将半导体生产线多代理模型按层次划分为设备代理层、设备组层和系统层,有效地降低了模型的复杂性,提高了模型的可重用性。建立了分布式半导体生产线仿真平台,以实现基于面向代理的着色赋时 Petri网的半导体生产线仿真定量分析与评价。以上海某半导体制造企业6英寸晶圆生产线为例,其仿真结果验证了建模与仿真的有效性。 To effectively analyze & evaluate performance of control and scheduling strategies for multi-agent based semiconductor prodcution line, an agent-oriented colored timed Petri net (AOCTPN) modeling technology was proposed. The interior behavior of machine agent was encapsulated so that colored timed Petri net based machine agent model was setup. Hierarchical multi-agent based semiconductor production line model was divided into machine agent layer, machine group layer and system layer so as to reduce complexity and improve reuse of the model. Besides, a distributed simulation platform was constructed to implement analysis & evaluation of the performance of scheduling and control of AOCTPN based semiconductor production line. An illustrative example of 6 inches semiconductor production line in Shanghai indicated the effectiveness of the approach.
出处 《计算机集成制造系统》 EI CSCD 北大核心 2005年第3期326-329,351,共5页 Computer Integrated Manufacturing Systems
基金 国家自然科学基金资助项目(50375097 50375098)~~
关键词 半导体生产线 面向代理的着色赋时Petri网 建模与仿真 semiconductor fabrication line agent-oriented colored timed Petri net modeling and simulation
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  • 1PARK J, REVELIOTIS S A, BODNER D A, et al. High-fidelity rapid prototyping of 300 mm fabs through discrete event system modeling[J]. Computers in Industry, 2001,45 (1): 79-98.
  • 2CHENJ H, FU LC, LINM H. Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication[J]. IEEE Transctions on Robotics and Automation, 2001,17 (5) :619-636.
  • 3LIN M H, FU L C. Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri Net approach[A]. Proceedings of IEEE International Conference on Systems, Man, and Cybernetics[C]. Tokyo, Japan:IEEE,1999. 769-774.
  • 4KUO C H, HUANG H P. Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net[A]. Proceedings of the 2000 IEEE International Conference on Robotics &Automation[C]. San Francisco,CA, USA:IEEE, 2000. 1378-1383.

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