摘要
This letter proposes a novel design of a Micro Electro Mechanical System （MEMS） device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.
This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory microstructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude,such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.
基金
Supported by the National Natural Science Foundation of China (No.60172001).
